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Technical, industrial, inert gases and signature gas mixtures

High-purity gas mixtures for advanced technological processes

NF3

5N

Purity

Semiconductor industry Plasma cleaning of CVD/PECVD chambers

C4F6

4N

Purity

Semiconductor industry Plasma etching

C4F8

5N

Purity

Semiconductor industry

NH3

7N

Purity

Chemical industry

SF6

5N

Purity

Semiconductor industry Plasma etching

CF4

5N

Purity

Semiconductor industry Plasma etching Reactive Ion Etching (RIE)

Si2H6

5N

Purity

TFT matrix display

SiH4

5N

Purity

Thin film solar cells (TFSC) production

SiF4

5N

Purity

Semiconductor industry Plasma etching

CO

5N

Purity

Medicine, laboratories

Cl2

5N

Purity

PVC production Water treatment

TCS

5N

Purity

Ultra-pure silicon production

C2F6

5N

Purity

Semiconductor industry Plasma etching

BCl3

5N

Purity

Semiconductor industry Plasma etching

CH3F

4N

Purity

Semiconductor industry Reagent for the production of organofluorine compounds

AsH3

6N

Purity

Semiconductor industry An alloying gas

H2S

3N, 4N

Purity

Raw material for sulfur production

PH3

6N

Purity

Semiconductor industry Silicon alloying

HCl

5N5

Purity

Steel pickling

NH3

7N

Purity

Raw material for nitric acid/fertilizers
View all

Gas mixtures

SiH4 mix

PH3 mix

AsH3 mix

B2H6 mix

We create gas mixtures with different percentages according to the needs and specifics of the customer’s production processes

Our signature gas mixtures

Require unique products? FRD develops and ensures the stability of ultra-complex gas mixtures.

3.5% Ar / 10ppm Xe / Ne

Purity:

Xe 8~12 ppm

Ar 3.45~3.55%

Components

0.95%F2+3.5% Ar / Ne

Purity:

F2 0.9~1.0%

Ar 3.45~3.55%

Components

1.25% Kr / Ne

Purity:

F2 0.9~1.0%

Ar 1.2~1.3%

Components

0.95%F2+1.25%Kr/ Ne

Purity:

F2 0.9~1.0%

Ar 1.2~1.3%

Components

Pure Gases

Inert gases of high purity and uncompromising quality for industries where every detail matters

Xe

5N

Purity

Space Microelectronics

Kr

5N

Purity

Lighting Lasers

Ne

high-purity grades

Purity

Lighting Semiconductor industry Cryogenic equipment Lasers

Isotopes

Isotopes meeting the strictest standards of the medical industry and other fields where ultra-high precision is vital

D2

5N

Purity

Semiconductor industry Optics Medicine

Kr

5N

Purity

Biology Medicine

D2O

5N

Purity

Medicine Food-grade propylene

Ready to place an order or need a more detailed consultation and technical specification development for custom gas mixtures tailored to your unique requirements?

Fill out the contact form, and our team will get back to you shortly:

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    3.5% Ar / 10ppm Xe / Ne

    Purity:

    Xe 8~12 ppm

    Ar 3.45~3.55%

    Components (ppmv)

    H2O

    ≤0.3

    CO2

    ≤ 0.1

    O2

    ≤0.1

    He

    ≤ 8.0

    N2

    ≤0.5

    Kr

    ≤ 1.0

    CH4

    ≤0.1

    CF4

    ≤0.1

    CO

    ≤0.1.3

    0.95%F2+3.5% Ar / Ne

    Purity:

    F2 0.9~1.0%

    Ar 3.45~3.55%

    Components (ppmv)

    O2

    ≤25

    CF4

    ≤2

    N2

    ≤25

    SiF4

    ≤2

    Xe

    ≤1

    NF3

    ≤1

    He

    ≤8

    SF6

    ≤1

    1.25% Kr / Ne

    Purity:

    F2 0.9~1.0%

    Ar 1.2~1.3%

    Components (ppmv)

    H2O

    ≤0.3

    CO2

    ≤ 0.1

    O2

    ≤0.2

    He

    ≤ 8.0

    N2

    ≤0.5

    Xe

    ≤ 1.0

    CH4

    ≤0.1

    CF4

    ≤0.1

    CO

    ≤0.1

    0.95%F2+1.25%Kr/ Ne

    Purity:

    F2 0.9~1.0%

    Ar 1.2~1.3%

    Components (ppmv)

    O2

    ≤25

    CF4

    ≤2

    N2

    ≤25

    SiF4

    ≤2

    Xe

    ≤1

    NF3

    ≤1

    He

    ≤8

    SF6

    ≤1